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Facility ID: 05452BMXXX1000R
Facility Name and Address: GLOBALFOUNDRIES U.S. 2 LLC - VERMONT FACILITY 1000 RIVER ST ESSEX JUNCTION, VT 05452 Parent Company: GLOBALFOUNDRIES US INC Industry: Semiconductor and Related Device Manufacturing (334413) Chemical: Hydrogen fluoride Reports: View TRI Facility profile report for this facility View TRI Form R submissions by this facility |
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Production Related Waste Management for Selected Chemical
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Pollution Prevention Activities for Selected Chemical
Reporting Year | Section 8.10: Newly Implemented Source Reduction Activity | Section 8.10: Methods to Identify Activity | Section 8.11: Optional Pollution Prevention Information* |
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2022 |
Source Reduction:: S25: Other process modifications made
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Methods to Identify SR Opportunities: T04: Participative team management
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2021 |
Source Reduction:: S25: Other process modifications made
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Methods to Identify SR Opportunities: T04: Participative team management
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2020 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2019 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2018 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
W51: At-tool chemical recycle for 49% Hydrofluoric Acid on Clean/Etch tools: After the wafers are sprayed the chemical is routed back to a tank where it is filtered and reused. The chemical is used until the HF in the Nitric acid/HF mixture is spent. W58: POST BPSG Chemical Mechanical Polish clean elimination: This step utilized Hydrochloric Acid, Hydrogen peroxide, sulfuric acid, Dilute Hydrofluoric Acid, and Ammonium Hydroxide. |
2017 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
W51: At-tool chemical recycle for 49% Hydrofluoric Acid on Clean/Etch tools: After the wafers are sprayed the chemical is routed back to a tank where it is filtered and reused. The chemical is used until the HF in the Nitric acid/HF mixture is spent. W58: Project 1: POST BPSG Chemical Mechanical Polish clean elimination: This step utilized Hydrochloric Acid, Hydrogen peroxide, sulfuric acid, Dilute Hydrofluoric Acid, and Ammonium Hydroxide.Project 2: Post Chemical Mechanical Polish Mc A/B Clean elimination: A clean step post Chemical Mechanical polish process was eliminated. This step utilized Hydrofluoric acid and Ammonium Hydroxide. |
2016 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications Source Reduction:: W78: Other surface preparation and finishing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
W51: At tool recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the mixture is spent. In 2016, approximately 75,000 pounds of 49% hydrofluoric acid was recycled at the tools. W58: In 2016, the surface prep team worked on optimizing multiple chemical cleaning steps, and where technically feasible combining them into one chemical cleaning step, thus resulting in process optimizations and associated chemical savings. The chemical savings resulting from multiple process optimizations in 2016 were as follows: Ammonium Hydroxide 827 gals, Hydrogen Peroxide 3537 gals, Hydrochloric Acid 672 gals, Isopropyl Alcohol 8818 gals, Sulfuric Acid 5683 gals, Hot DI 694,230 gals, Cold DI water 390,512 gals, Hydrofluoric Acid 41 gals W78: Product Batch Size Optimizations for optimized chemical use: In 2015, the surface prep team began evaluation of batch size optimizations on certain manufacturing tools. The goal of this project was to optimize batch size so more product could be run using the same amount of chemical. The idea was implemented in 2016. The chemicals optimized included hydrofluoric acid, sulfuric acid, hydrogen peroxide, hydrochloric acid, and ammonium hydroxide. Chemical savings from batching were 13% on one tool set and 24 % on the other tool set. |
2015 |
Source Reduction:: W51: Instituted recirculation within a process[-25-49%]
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Methods to Identify SR Opportunities: T04: Participative team management
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Other Environmental Practices: Recycling - W51: At tool recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the mixture is spent. In 2015, approximately 75,000 pounds of 49% hydrofluoric acid was recycled at the tools. |
2014 |
Source Reduction:: W51: Instituted recirculation within a process[-25-49%]
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Methods to Identify SR Opportunities: T04: Participative team management
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Other Environmental Practices: Recycling - At tool recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the mixture is spent. In 2014, 75,566 pounds of 49% hydrofluoric acid was recycled at the tools. |
2013 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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W51: At tool chemical recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the HF in the mixture is spent. |
2012 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
W51: At tool chemical recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the HF in the mixture is spent. W58: The frequency of parts cleaning has been reduced for certain wafer technologies. This specific parts clean process change has resulted in a reduction in the use of a Nitric Acid/HF mixture. |
2011 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
W51: Chemical recycle capability is utilized. Chemical is routed back to a tank where it is filtered and reused until the HF in the mixture is spent. W58: Process changes involving the elimination of a parts cleaning process and moving a process from one piece of equipment with a higher HF flow to another tool set using a lower chemical flow. |
2010 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
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2009 |
Source Reduction:: W19: Other changes in operating practices
Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W58: Other process modifications Source Reduction:: W71: Other cleaning and degreasing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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2008 |
Source Reduction:: W13: Improved maintenance scheduling, recordkeeping, or procedures
Source Reduction:: W19: Other changes in operating practices Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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2007 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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2006 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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2005 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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2004 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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2003 |
Source Reduction:: W14: Changed production schedule to minimize equipment and feedstock changeovers
Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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2002 |
Source Reduction:: W14: Changed production schedule to minimize equipment and feedstock changeovers
Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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2001 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2000 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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1999 |
Source Reduction:: W19: Other changes in operating practices
Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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1998 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T11: Other
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) |
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1997 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T11: Other
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1996 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T11: Other
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1995 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management |
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1991 |
Source Reduction:: W42: Substituted raw materials
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Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T06: Employee recommendation (under a formal company program) |