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Facility ID: 05452BMXXX1000R
Facility Name and Address: GLOBALFOUNDRIES U.S. 2 LLC - VERMONT FACILITY 1000 RIVER ST ESSEX JUNCTION, VT 05452 Parent Company: GLOBALFOUNDRIES US INC Industry: Semiconductor and Related Device Manufacturing (334413) Chemical: Sulfuric acid (acid aerosols including mists, vapors, gas, fog, and other airborne forms of any particle size) Reports: View TRI Facility profile report for this facility View TRI Form R submissions by this facility |
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Production Related Waste Management for Selected Chemical
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Pollution Prevention Activities for Selected Chemical
Reporting Year | Section 8.10: Newly Implemented Source Reduction Activity | Section 8.10: Methods to Identify Activity | Section 8.11: Optional Pollution Prevention Information* |
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2022 |
Source Reduction:: S25: Other process modifications made
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Methods to Identify SR Opportunities: T04: Participative team management
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2021 |
Source Reduction:: S25: Other process modifications made
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Methods to Identify SR Opportunities: T04: Participative team management
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2020 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2019 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2018 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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W58: Chemical optimizations on the FSI tools (Hydrochloric Acid, Sulfuric Acid and Hydrogen Peroxide). A newer process was qualified on the FSI spray tools that runs a reduced process recipe time. Full technical feasibility assessments were completed and the project is fully implemented on certain high volume technologies. |
2017 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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W58: Chemical optimizations on the FSI tools (Hydrochloric Acid, Sulfuric Acid and Hydrogen Peroxide). A newer process was qualified on the FSI spray tools that runs a reduced process recipe time. Full technical feasibility assessment was completed in 2017 and currently the project is in a 30% phase in on certain high volume technologies. |
2016 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W58: Other process modifications Source Reduction:: W78: Other surface preparation and finishing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
W42: Migrated some of the wet etch processes that use sulfuric acid in the mask manufacturing line to a dry etch process. In 2015, full qualification and 25 % of this conversion were completed. The full implementation occurred in 2016. This resulted in the following chemical savings: 836 gals of PEH-3 (Hydrochloric Acid containing chemistry), 656 gals of CR-7 etchant, 435 gals of sulfuric acid W58: In 2016, the surface prep team worked on optimizing multiple chemical cleaning steps, and where technically feasible combining them into one chemical cleaning step, thus resulting in process optimizations and associated chemical savings. The chemical savings resulting from multiple process optimizations in 2016 were as follows: Ammonium Hydroxide 827 gals, Hydrogen Peroxide 3537 gals, Hydrochloric Acid 672 gals, Isopropyl Alcohol 8818 gals, Sulfuric Acid 5683 gals, Hot DI 694,230 gals, Cold DI water 390,512 gals, Hydrofluoric Acid 41 gals W78: Product Batch Size Optimizations for optimized chemical use: In 2015, the surface prep team began evaluation of batch size optimizations on certain manufacturing tools. The goal of this project was to optimize batch size so more product could be run using the same amount of chemical. The idea was implemented in 2016. The chemicals optimized included hydrofluoric acid, sulfuric acid, hydrogen peroxide, hydrochloric acid, and ammonium hydroxide. Chemical savings from batching were 13% on one tool set and 24 % on the other tool set. |
2015 |
Source Reduction:: W42: Substituted raw materials[-0-4%]
Source Reduction:: W58: Other process modifications[-0-4%] |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
Source Reduction - W58: Combined wafer cleaning processes on certain technology levels to reduce the following clean chemistry use: Hydrogen Peroxide - 422 gals/year, Sulfuric Acid - 1483 gals/year, and Ammonium Hydroxide - 113 gals/year.
Source Reduction: Source Reduction - W42: Migrated some of the wet etch processes that use sulfuric acid in the mask manufacturing line to a dry etch process. In 2015, full qualification and 25 % of this conversion were completed. The full implementation will occur in 2016. |
2014 |
Source Reduction:: W13: Improved maintenance scheduling, recordkeeping, or procedures[-25-49%]
Source Reduction:: W42: Substituted raw materials[-0-4%] |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
Other Environmental Practices - Sulfuric acid air emissions were reduced by 25.4% in 2014 due to increased sulfuric acid treatment efficiency on two central treatment units at the facility. The increased treatment efficiency was realized due to optimized maintenance on the treatment units.
Source Reduction: Source Reduction - In 2014, all new Mask House technologies being introduced in the manufacturing line are using the ozone clean process in lieu of the wet chemistry thus further avoiding the use of sulfuric acid. In addition, certain Mask House technologies were moved from current wet cleaning chemistries using sulfuric acid to ozone cleans. |
2013 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W52: Modified equipment, layout, or piping |
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
W42: All new technologies being introduced in the mask manufacturing line are using the ozone clean process in lieu of a sulfuric/peroxide wet chemistry thus further avoiding the use of sulfuric acid in this process. W52: Tool consolidations in 2013 on two different tool sets (wets and copper plating) resulted in a reduction in the use of sulfuric acid. |
2012 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W52: Modified equipment, layout, or piping |
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
W42: All new technologies being introduced in the mask manufacturing line are using the ozone clean process in lieu of a sulfuric/peroxide wet chemistry thus avoiding the use of sulfuric acid in this process. W52: Tool consolidations in 2012 resulted in a reduction in the use of sulfuric acid in the copper plating tool set. |
2011 |
Source Reduction:: W42: Substituted raw materials
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Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management |
Source Reduction - All new Mask House technologies being introduced in the manufacturing line are using the ozone clean process in lieu of the wet chemistry thus further avoiding the use of sulfuric acid. The typical pellicle adhesive removal process in the Mask House relies on sulfuric acid. The Mask House team have developed a sulfuric acid free process for certain pellicles in the newer technology nodes. The plan is to qualify the older technologies with the sulfuric acid free process. |
2010 |
Source Reduction:: W42: Substituted raw materials
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Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management |
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2009 |
Source Reduction:: W19: Other changes in operating practices
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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1997 |
Source Reduction:: W75: Changed from spray to other system
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Methods to Identify SR Opportunities: T11: Other
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1994 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T11: Other
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1992 |
Source Reduction:: W55: Changed from small volume containers to bulk containers to minimize discarding
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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1991 |
Source Reduction:: W55: Changed from small volume containers to bulk containers to minimize discarding
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Methods to Identify SR Opportunities: T04: Participative team management
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