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Facility ID: 05452BMXXX1000R
Facility Name and Address: GLOBALFOUNDRIES U.S. 2 LLC - VERMONT FACILITY 1000 RIVER ST ESSEX JUNCTION, VT 05452 Parent Company: GLOBALFOUNDRIES US INC Industry: Semiconductor and Related Device Manufacturing (334413) Chemical: Nitric acid Reports: View TRI Facility profile report for this facility View TRI Form R submissions by this facility |
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Production Related Waste Management for Selected Chemical
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Pollution Prevention Activities for Selected Chemical
Reporting Year | Section 8.10: Newly Implemented Source Reduction Activity | Section 8.10: Methods to Identify Activity | Section 8.11: Optional Pollution Prevention Information* |
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2022 |
Source Reduction:: S25: Other process modifications made
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Methods to Identify SR Opportunities: T04: Participative team management
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2021 |
Source Reduction:: S25: Other process modifications made
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Methods to Identify SR Opportunities: T04: Participative team management
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2020 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2019 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2018 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
W51: Continued work on at-tool chemical recycle for the Nitric Acid/HF Mixture. The used chemical mixture is routed back to a tank where it is filtered and reused until the HF in the Nitric acid/HF mixture is spent. W58: Platinum Silicide Cleans alternate chemistry evaluations were conducted that would eliminate the use of Aqua Regia (composed of Nitric and Hydrochloric acid) in this process. The alternate chemistry has been shown to work. Full qualification was completed in 2018 and conversion to the new process is planned for 2019. |
2017 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications Source Reduction:: W71: Other cleaning and degreasing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
W51: At-tool chemical recycle for the Nitric Acid/HF Mixture. The used chemical mixture is routed back to a tank where it is filtered and reused until the HF in the Nitric acid/HF mixture is spent. W58: Platinum Silicide Cleans alternate chemistry evaluations were conducted that would eliminate the use of Aqua Regia (composed of Nitric and Hydrochloric acid) in this process. Evaluation promising and full implementation planned.Technical feasibility evaluations The alternate chemistry has shown to have worked. Full implementation is planned in 2018. W71: Cobalt Silicide Cleans Elimination combines 2-step (FSI and Steag) clean process to 1-step Zeta process. The process was implemented in Sept 2016 with 2017 full-year savings of Nitric Acid (1830 gal), Hydrogen Peroxide (20,277 gal), and Hydrochloric Acid (789 gal). |
2016 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications Source Reduction:: W71: Other cleaning and degreasing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
W51: At tool recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the mixture is spent. In 2016, 33,899 pounds of nitric acid was recycled at the tools. W58: In 2016, there was a reduction in the use of Aqua Regia (a chemical that constitutes Nitric Acid, Hydrochloric acid and water) causing a decrease in the use of nitric acid and hydrochloric acid in this process. This was accomplished by reduced bath exchange and Increased batching of wafers. This change was implemented in May 2016. The chemical savings in 2016 were as follows: 2,963 gals of Hydrochloric Acid, 339 gals of Nitric Acid. W71: Cobalt Silicide Cleans Elimination: Combine 2-step clean process to 1-step Zeta process. Eliminates the use of Nitric Acid and Hydrogen Peroxide in this process. The process was implemented in September 2016. 2016 chemical savings are as follows: Nitric Acid 458 gals, Hydrogen Peroxide 5,069 gals, Hydrochloric Acid 197 gals |
2015 |
Source Reduction:: W51: Instituted recirculation within a process[-25-49%]
Source Reduction:: W82: Modified design or composition of product[-0-4%] |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
Source Reduction: Source Reduction - W82: In 2015, there was a reduction in the product mix that drives the use of Aqua Regia (a chemical that constitutes Nitric Acid, Hydrochloric acid and water) causing a decrease in the use of nitric acid and hydrochloric acid in this process. Other Environmental Practices: Recycling - W51: At tool recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the mixture is spent. In 2015, 33,899 pounds of nitric acid was recycled at the tools. |
2014 |
Source Reduction:: W51: Instituted recirculation within a process[-25-49%]
Source Reduction:: W82: Modified design or composition of product[-0-4%] |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
Other Environmental Practices: Recycling - At tool recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the mixture is spent. In 2014, 33,899 pounds of nitric acid was recycled at the tools. |
2013 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
W51: At tool chemical recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the nitric acid in the mixture is spent. W58: The bath life of a chemical that constitutes Nitric Acid, Hydrochloric acid and water was modified in 2013 on a certain tool set. The process change resulted in less bath exchanges thereby reducing the chemical used by this process. |
2012 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
W51: At tool chemical recycle capability is utilized. Chemical is used and then routed back to a tank where it is filtered and reused until the nitric acid in the mixture is spent. W58: The frequency of parts cleaning has been reduced for certain wafer technologies. This specific parts clean process change has resulted in a reduction in the use of a Nitric Acid/HF mixture. |
2011 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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Other Environmental Practices - Chemical recycle capability utilized. The chemical is routed back to a tank where it is filtered and reused. The chemical is used until the HF in the Nitric acid/HF mixture is spent. |
2010 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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2009 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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2008 |
Source Reduction:: W19: Other changes in operating practices
Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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2007 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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2006 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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2004 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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2003 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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2002 |
Source Reduction:: W14: Changed production schedule to minimize equipment and feedstock changeovers
Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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2001 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2000 |
Source Reduction:: W51: Instituted recirculation within a process
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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1999 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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1998 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W51: Instituted recirculation within a process |
Methods to Identify SR Opportunities: T11: Other
Methods to Identify SR Opportunities: T11: Other |
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1997 |
Source Reduction:: W42: Substituted raw materials
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Methods to Identify SR Opportunities: T11: Other
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1996 |
Source Reduction:: W42: Substituted raw materials
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Methods to Identify SR Opportunities: T11: Other
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1995 |
Source Reduction:: W53: Use of a differant process catalyst
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Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
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1992 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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