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Facility ID: 05452BMXXX1000R
Facility Name and Address: GLOBALFOUNDRIES U.S. 2 LLC - VERMONT FACILITY 1000 RIVER ST ESSEX JUNCTION, VT 05452 Parent Company: GLOBALFOUNDRIES US INC Industry: Semiconductor and Related Device Manufacturing (334413) Chemical: Nitrate compounds (water dissociable; reportable only when in aqueous solution) Reports: View TRI Facility profile report for this facility View TRI Form R submissions by this facility |
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Production Related Waste Management for Selected Chemical
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Pollution Prevention Activities for Selected Chemical
Reporting Year | Section 8.10: Newly Implemented Source Reduction Activity | Section 8.10: Methods to Identify Activity | Section 8.11: Optional Pollution Prevention Information* |
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2022 |
Source Reduction:: S25: Other process modifications made
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Methods to Identify SR Opportunities: T04: Participative team management
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2021 |
Source Reduction:: S25: Other process modifications made
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Methods to Identify SR Opportunities: T04: Participative team management
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2020 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2019 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2018 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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W58: Conversion of certain technology levels from a two-step polish to a one Step Tungsten Polish. Qualify KXY grooved pad process for M1 Deintegrated Cu CMP to achieve maximum deployment flexibility and reduce M1 polish time and slurry used. Both these projects resulted in nitrates and other CMP (chemical mechanical polish) source reductions through 2018. Other Environmental Practices: Waste Treatment - In 2018, the nitrate reduction efforts for the future remained strong with the continued diligence and support of the denitrification steps in the biological treatment sequential batch reactors (SBR's). |
2017 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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W58: Project Name: Conversion of certain technology levels from a two-step polish to a one Step Tungsten Polish Project Name: Qualify KXY grooved pad process for M1 Deintegrated Cu CMP to achieve maximum deployment flexibility and reduce M1 polish time and slurry used. Both these projects resulted in nitrates and other CMP (chemical mechanical polish) source reductions through 2018. Other Environmental Practices: Waste Treatment - In 2017, the nitrate reduction efforts for the future remained strong with the continued diligence and support of the denitrification steps in the biological treatment sequential batch reactors (SBR's). |
2016 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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W58: Nitrate use reduction in Chemical Mechanical Polish (CMP) processes. The goal of the CMP process is to continually remove a metal or oxide film at the wafer surface until a targeted film thickness remains. In both metal tungsten and copper CMP processes, ferric nitrate is a critical component of the slurry because it oxidizes metal to facilitate chemical dissolution and removal. Two projects were completed to reduce CMP chemical usage in 2016. Faster copper process: The best way to lower total slurry use was to substantially reduce CMP processing time. The team focused on optimizing the existing slurry chemistry to dramatically boost the polish rate. The faster process also enabled better manufacturing controls. In significantly dropping the total CMP process time, the team saved 184,000 gallons annually in chemicals from four CMP slurries containing ferric nitrate, hydrogen peroxide, alumina, silica, and various inorganic and organic constituents. This project specifically reduced the use of ferric nitrate by 7,000 lbs which equates to 1,794 lbs of nitrates. Lower flow rate of slurry on the tungsten polish process: A process change was made to lower the flow rate of the slurry used in the tungsten polishing process in CMP. This lower flow process accomplishes the same removal of tungsten. This process change was done on 2 product levels and resulted in a total of 941 lbs of nitrates reduced for 2016. Other Environmental Practices: Waste Treatment - WASTE TREATMENT: In 2016, the nitrate reduction efforts remained strong with the continued diligence and support of the denitrification steps in the biological treatment sequential batch reactors (SBR's). Ammonia and nitrate loading on the biological wastewater treatment plant increased by 15% and 85% respectively in 2016 compared to 2015. Nitrate treatment efficiency increased by 4% at the biological treatment plant and decreased by 1% at the industrial treatment plant. The nitrates treated in 2016 increased by 20% and the nitrates discharged decreased by 16% as compared to 2015. This equates to lowered releases of 21,967 lbs nitrates in 2016. |
2015 |
Source Reduction:: W58: Other process modifications[-0-4%]
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Methods to Identify SR Opportunities: T04: Participative team management
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Other Environmental Practices: Waste Treatment - WASTE TREATMENT: In 2015, the nitrate reduction efforts continued to be strong with the continued diligence and support of the denitrification steps in the biological treatment sequential batch reactors (SBR's) at the sanitary waste plant. Total nitrate loading to the sanitary waste plant increased by 30% in 2015 yet the discharges of nitrates increased only 24%. In addition, the wastewater team looks at all incoming tools to ensure all nitrate using tool waste streams are being diverted to the sanitary waste plant where more effective nitrates treatment is achieved. Source Reduction: Source Reduction - W58: Nitrate use reduction in Chemical Mechanical Polish (CMP) processes. The goal of the CMP process is to continually remove a metal or oxide film at the wafer surface until a targeted film thickness remains. In both metal tungsten and copper CMP processes, ferric nitrate is a critical component of the slurry because it oxidizes metal to facilitate chemical dissolution and removal. In optimizing the copper and tungsten CMP processes, the team removed unnecessary steps that use ferric nitrate to ultimately reduce the overall nitrate usage of both processes by 1380 lbs/yr. Other improvements were also realized from this process change including chemical slurry usage reductions, increased consumable life, tool availability, and increased performance stability in device line resistance. |
2014 |
Source Reduction:: W19: Other changes in operating practices[-0-4%]
Source Reduction:: W58: Other process modifications[-0-4%] Source Reduction:: W82: Modified design or composition of product[-5-14%] |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
Source Reduction: Source Reduction - (1) In 2014, Ferric nitrate savings continued from the utilization of the reduced flow Ebara vision process. This process minimizes flow thus reducing chemical use to achieve the same process results. IBM Burlington saved/avoided the use of approximately 4654 grams or 10 pounds of Nitrates in 2014. (2) In 2014, the product mix is moving to RF/Analog technologies that use less grams of Ferric Nitrate per wafer. This drove approximately 10,000 pounds less of Ferric Nitrate used in the Chemical Mechanical Process in 2014. Other Environmental Practices: Waste Treatment - In 2014, the total nitrates discharged went down by 5%, due to the continued diligence and support of the denitrification steps in the biological treatment sequential batch reactors (SBR's). Also, the nitrates loading to the waste treatment plant continued to be optimized. The waste from two nitric acid using tools using approximately 4 gals of 70 % nitric acid / day continued to be diverted to the sanitary waste plant. This allowed for the nitrates loading to the industrial wastewater treatment process to be reduced. By diverting more nitrate waste streams from the industrial waste stream to the sanitary waste plant more effective nitrates treatment was achieved. |
2013 |
Source Reduction:: W19: Other changes in operating practices
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
W19: 3175 pounds of drummed waste ferric nitrate containing CMP slurries were treated at the on-site biological treatment plant, instead of sending off-site for disposal. W58: In 2013, ferric nitrate savings continued from the utilization of the reduced flow Ebara vision process. This process minimizes the flow thus reducing chemical use while achieving the same process results. |
2012 |
Source Reduction:: W52: Modified equipment, layout, or piping
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
W52: Nitrate treatment improvements at the wastewater treatment facility (see detailed description). W58: In 2012, ferric nitrate savings continued from the utilization of the reduced flow Ebara vision process. This process minimizes flow thus reducing chemical use to achieve same process results. Other Environmental Practices - Improvements in nitrate treatment efficiencies due to the continued optimization of the denitrification steps in the biological treatment sequential batch reactors (SBR's). Continued to divert more nitric acid and nitrate waste streams from the industrial waste plant to the sanitary waste plant for more effective nitrates treatment. |
2011 |
Source Reduction:: W52: Modified equipment, layout, or piping
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
W52: Nitrate treatment efficiencies at the wastewater treatment facility (see detailed description). W58: In 2011, Ferric nitrate savings continued from the utilization of the reduced flow Ebara vision process. This process minimizes flow thus reducing chemical use to achieve same process results. Source Reduction - Nitrate treatment efficiencies are becoming much more stable in the wastewater treatment facility due to the continued diligence and support of the denitrification steps in the biological treatment sequential batch reactors (SBR''s). In 2011 Nitrates treatment increased by 4%. In addition, the waste from 2 Nitric acid using tools was diverted to the Sanitary Waste Plant. By diverting more nitrate waste streams from the industrial waste stream to the Sanitary Waste Plant more effective nitrates treatment was achieved. |
2010 |
Source Reduction:: W52: Modified equipment, layout, or piping
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T04: Participative team management |
Other Environmental Practices - Nitrate compounds used in manufacturing enter the treatment process directly. Nitrates are also created in the sanitary wastewater treatment plant during the reduction of ammonia. An in depth full scale mass balance analysis was conducted for nitrate and ammonia on all three wastewater treatment systems (Industrial, Sanitary, and Chemical Mechanical Polish treatment). Based upon this analysis it was determined that the Sanitary plant effluent contributed 30% of the total nitrate in the overall effluent. Experiments (jar tests) were designed for the sanitary process to adjust the oxygen on and off cycles so that the anaerobic (lack of oxygen) microorganisms would reduce the nitrate to nitrogen gas. The process was then implemented in the SBR's. The change was relatively simple: Two separate anoxic (no oxygen) cycles were added to the treatment process followed directly with an organic waste spike (using the current sanitary influent) during the normal aerobic operation of the SBR treatment cycles. This change reduced the nitrate output by over 50% in the biological effluent, and 13% in the industrial effluent from 2008 to 2009. Note: The change took affect in all 3 SBR's at the end of November 2009. This project resulted in an additional 17,445 pounds being treated in 2010. The flows in 2010 increased by 7.43% and nitrate discharges reduced by .45%. Next steps: Further opportunities have been identified to reduce nitrates loading to the industrial wastewater process by diverting more nitrate waste streams from the industrial waste stream to the Sanitary Waste Plant where more effective nitrates treatment is obtained. |
2009 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T03: Materials balance audits
Methods to Identify SR Opportunities: T04: Participative team management |
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2008 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2005 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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2004 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
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2003 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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2002 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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2001 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W81: Changed product specifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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2000 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W81: Changed product specifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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1999 |
Source Reduction:: W42: Substituted raw materials
Source Reduction:: W81: Changed product specifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
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1998 |
Source Reduction:: W52: Modified equipment, layout, or piping
Source Reduction:: W54: Instituted better controls on operating bulk containers to minimize discarding Source Reduction:: W81: Changed product specifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
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1997 |
Source Reduction:: W52: Modified equipment, layout, or piping
Source Reduction:: W54: Instituted better controls on operating bulk containers to minimize discarding Source Reduction:: W81: Changed product specifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |