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Facility ID: 18707GSLDS125CR
Facility Name and Address: FAIRCHILD SEMICONDUCTOR 125 CRESTWOOD DR MOUNTAIN TOP, PA 18707 Parent Company: ONSEMI Industry: Semiconductor and Related Device Manufacturing (334413) Chemical: Hydrogen fluoride Reports: View TRI Facility profile report for this facility View TRI Form R submissions by this facility |
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Production Related Waste Management for Selected Chemical
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Pollution Prevention Activities for Selected Chemical
Reporting Year | Section 8.10: Newly Implemented Source Reduction Activity | Section 8.10: Methods to Identify Activity | Section 8.11: Optional Pollution Prevention Information* |
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2022 |
Source Reduction:: S21: Optimized process conditions to increase efficiency[-0-4%]
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Methods to Identify SR Opportunities: T05: Employee recommendation (independent of a formal company program)
Barriers: B3-Barriers to P2 B3 - Concern that product quality may decline as a result of source reduction. |
S21: Optimizing chamber cleaning processes with regard to fluorinated PFC gases, which partially break down to form HF. Using less PFC reduces the amount of HF Formed. Source Reduction - Company GHG emissions reduction goals (Net Zero Carbon Emissions) Barriers to P2: B3 - Concern that product quality may decline as a result of source reduction. - Processes may need qualification to ensure process recipe changes do not degrade the quality of the products. |
2021 |
Source Reduction:: S21: Optimized process conditions to increase efficiency[-0-4%]
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Methods to Identify SR Opportunities: T05: Employee recommendation (independent of a formal company program)
Barriers: B3-Barriers to P2 B3 - Concern that product quality may decline as a result of source reduction. |
S21: Optimize chamber cleaning processes with regard to fluorinated PFC gases, which partially break down to form HF. Using less PFC also reduces the amount of HF formed. Source Reduction - Company GHG emissions reduction goals (Net Zero) Barriers to P2: B3 - Concern that product quality may decline as a result of source reduction. - Processes may need qualification to ensure process recipe changes do not degrade quality. |
2020 |
Source Reduction:: W19: Other changes in operating practices
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Methods to Identify SR Opportunities: T11: Other
Barriers: B3-Barriers to P2 B3 - Concern that product quality may decline as a result of source reduction. Barriers: B1-Barriers to P2 B1 - Insufficient capital to install new source reduction equipment or implement new source reduction activities/initiat |
W19: Some equipment utilizes burn-wet point of use abatement which transfers more HF from gas phase into aqueous phase for treatment. Source Reduction - Improved air emissions control Barriers to P2: B1 - Insufficient capital to install new source reduction equipment or implement new source reduction activities/initiat - Company expects return on investment <1 year for capital projects. Barriers to P2: B3 - Concern that product quality may decline as a result of source reduction. - Changes to product recipes requires requalification and verification that process has not been adversely affected. |
2019 |
Barriers: B3-Barriers to P2 B3 - Concern that product quality may decline as a result of source reduction.
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Other Environmental Practices: General Environmental Management - Manuafcturing processes use F-gases (e.g. C4F8). Abatement systems are used to convert waste F-gases into HF to avoid GHG emissions. HF is treated by scrubbing but any HF which passes through scrubber to air (typically <= 5%) is emitted as TRI chemical in the process. Abating more F-gas emission will slightly increase HF emission. Barriers to P2: B3 - Concern that product quality may decline as a result of source reduction. - Changing chemistry requires process re-qualification. Facility expanded production in 2019. Chemistry optimization was not a focus at that time. |
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2016 |
Barriers: B7-Barriers to P2 B7 - No known substitutes or alternative technologies.
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Other Environmental Practices - Improved greenhouse gas (F-gas) abatement systems will likely be installed in the future. These break down F-gases to form additional HF which is safely and easily converted to inert products.
Barriers to P2: B7 - No known substitutes or alternative technologies. - HF and fluorinated gases are required to etch silicon dioxide. Source Reduction: Source Reduction - Reduce usage of HF-containing etchants in wafer thinning process, get longer bath life from HF-containing etchants. |
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2014 |
Source Reduction:: W58: Other process modifications[-0-4%]
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Methods to Identify SR Opportunities: T11: Other
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2013 |
Other Environmental Practices - Wastewater pretreatment plant was modified in 2013 to perform single-step pH adjustment instead of two-step. Efficiency is just as good and it eliminates need for sulfuric acid and reduces total dissolved solids in effluent.
Other Barriers to Source Reduction - Process Qualification, changing chemical usages and process recipes requires modification of process and therefore corporate and customer qualification of change. |
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2011 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T05: Employee recommendation (independent of a formal company program) |
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2010 |
Source Reduction:: W51: Instituted recirculation within a process
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Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T05: Employee recommendation (independent of a formal company program) |
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1996 |
Source Reduction:: W29: Other changes in inventory control
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T11: Other
Methods to Identify SR Opportunities: T11: Other |
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1992 |
Source Reduction:: W29: Other changes in inventory control
Source Reduction:: W51: Instituted recirculation within a process |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) |
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1991 |
Source Reduction:: W29: Other changes in inventory control
Source Reduction:: W51: Instituted recirculation within a process Source Reduction:: W52: Modified equipment, layout, or piping |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s) Methods to Identify SR Opportunities: T05: Employee recommendation (independent of a formal company program) |