Production Related Waste Management for Selected Chemical
lchemid=007664417
Waste Management Comparison - 2019
Pollution Prevention Activities for Selected Chemical
| Reporting Year | Section 8.10: Newly Implemented Source Reduction Activity | Section 8.10: Methods to Identify Activity | Section 8.11: Optional Pollution Prevention Information* |
|---|---|---|---|
| 2022 |
Source Reduction:: S25: Other process modifications made
|
Methods to Identify SR Opportunities: T04: Participative team management
|
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| 2021 |
Source Reduction:: S25: Other process modifications made
|
Methods to Identify SR Opportunities: T04: Participative team management
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| 2020 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T04: Participative team management
|
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| 2019 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T04: Participative team management
|
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| 2018 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T04: Participative team management
|
W58: POST BPSG Chemical Mechanical Polish clean elimination: This step utilized Hydrochloric Acid, Hydrogen peroxide, sulfuric acid, Dilute Hydrofluoric Acid, and Ammonium Hydroxide. |
| 2017 |
Source Reduction:: W53: Use of a differant process catalyst
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
W53: Mask House project for Hydrochloric Acid (HCl) and Ammonium Hydroxide reduction by replacing the chromium wet etch with a dry etch. The dry chromium etching process, uses a chlorine and oxygen plasma to remove the exposed chromium eliminating the use of Ammonia, Sulfuric, and Hydrochloric chemicals in these steps. W58: Project 1: POST BPSG Chemical Mechanical Polish clean elimination: This step utilized Hydrochloric Acid, Hydrogen peroxide, sulfuric acid, Dilute Hydrofluoric Acid, and Ammonium Hydroxide.Project 2 : Post Chemical Mechanical Polish Mc A/B Clean elimination: A clean step post Chemical Mechanical polish process was eliminated. This step utilized Hydrofluoric acid and Ammonium Hydroxide. |
| 2016 |
Source Reduction:: W58: Other process modifications
Source Reduction:: W78: Other surface preparation and finishing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
W58: In 2016, the surface prep team worked on optimizing multiple chemical cleaning steps, and where technically feasible combining them into one chemical cleaning step, thus resulting in process optimizations and associated chemical savings. The chemical savings resulting from multiple process optimizations in 2016 were as follows: Project 1: Ammonium Hydroxide 92 gals, Dilute HF (49%) 1 gal, DI water Rinse 694,230 gals, DI water 390,512 gals Project 2 : Ammonium Hydroxide 827 gals, Hydrogen Peroxide 3537 gals, Hydrochloric Acid 672 gals, Isopropyl Alcohol 8818 gals, Sulfuric Acid 5683 gals, Hot DI 694,230 gals, Cold DI water 390,512 gals, Hydrofluoric Acid 41 gals W78: Product Batch Size Optimizations for optimized chemical use: In 2015, the surface prep team began evaluation of batch size optimizations on certain manufacturing tools. The goal of this project was to optimize batch size so more product could be run using the same amount of chemical. The idea was implemented in 2016. The chemicals optimized included hydrofluoric acid, sulfuric acid, hydrogen peroxide, hydrochloric acid, and ammonium hydroxide. Chemical savings from batching were 13% on one tool set and 24 % on the other tool set. |
| 2015 |
Source Reduction:: W58: Other process modifications[-0-4%]
|
Methods to Identify SR Opportunities: T04: Participative team management
|
Source Reduction - W58: Combined wafer cleaning processes on certain technology levels to reduce the following clean chemistry use: Hydrogen Peroxide - 422 gals/year, Sulfuric Acid - 1483 gals/year, and Ammonium Hydroxide - 113 gals/year. |
| 2014 |
Source Reduction:: W13: Improved maintenance scheduling, recordkeeping, or procedures[-5-14%]
|
Methods to Identify SR Opportunities: T04: Participative team management
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Other Environmental Practices - Ammonia air emissions were reduced by 5.8% in 2014 due to increased ammonia treatment efficiency on a central treatment unit at the facility. The increased treatment efficiency was realized due to optimized maintenance on the treatment unit. |
| 2013 |
Source Reduction:: W13: Improved maintenance scheduling, recordkeeping, or procedures
|
Methods to Identify SR Opportunities: T04: Participative team management
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W13: Ammonia air emissions were reduced by 55.7% in 2013 due to increased ammonia treatment efficiency in a couple of the central treatment units at the facility. |
| 2012 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management |
W58: Evaluated and qualified the elimination of a cleaning process step involving two chemicals for certain wafer technologies. One of the chemicals in the eliminated cleaning process contained ammonium hydroxide. |
| 2011 |
Source Reduction:: W52: Modified equipment, layout, or piping
|
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management |
Other Environmental Practices - Evaluated the use of a new air abatement technology on certain ammonia using semiconductor manufacturing tools. This air abatement technology replaces the current water based scrubbers which had less residence time and operational flexibility. Initial testing results show a 99%+ scrubbing efficiency of ammonia. |
| 2010 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management |
|
| 2005 |
Source Reduction:: W58: Other process modifications
Source Reduction:: W71: Other cleaning and degreasing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
|
| 2004 |
Source Reduction:: W58: Other process modifications
Source Reduction:: W71: Other cleaning and degreasing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
|
| 2003 |
Source Reduction:: W14: Changed production schedule to minimize equipment and feedstock changeovers
Source Reduction:: W58: Other process modifications Source Reduction:: W71: Other cleaning and degreasing modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management Methods to Identify SR Opportunities: T04: Participative team management |
|
| 2002 |
Source Reduction:: W14: Changed production schedule to minimize equipment and feedstock changeovers
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
|
| 2001 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T04: Participative team management
|
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| 2000 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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| 1999 |
Source Reduction:: W19: Other changes in operating practices
Source Reduction:: W58: Other process modifications |
Methods to Identify SR Opportunities: T04: Participative team management
Methods to Identify SR Opportunities: T04: Participative team management |
|
| 1998 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T11: Other
|
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| 1997 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T11: Other
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| 1996 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T11: Other
|
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| 1995 |
Source Reduction:: W58: Other process modifications
|
Methods to Identify SR Opportunities: T01: Internal pollution prevention opportunity audit(s)
Methods to Identify SR Opportunities: T04: Participative team management |
|
| 1994 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T11: Other
|
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| 1992 |
Source Reduction:: W58: Other process modifications
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Methods to Identify SR Opportunities: T04: Participative team management
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| 1991 |
Source Reduction:: W55: Changed from small volume containers to bulk containers to minimize discarding
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Methods to Identify SR Opportunities: T04: Participative team management
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TRI Pollution Prevention Glossary
The Waste Management Hierarchy |
The waste management hierarchy established by the Pollution Prevention Act (PPA) guides waste generators toward the best options for managing wastes.
The preferred option is to prevent pollution at its source, but for waste that is generated, the preferred management methods are recycling, followed
by burning for energy recovery, treatment and, as a last resort, disposing of the waste.
|
- A breakdown of production-related waste managed. This includes all amounts of the chemical released directly to the environment or otherwise managed as waste, other than waste generated by one-time events not associated with normal production processes (e.g., fires or remedial actions).
- A production ratio or activity index to provide context for reported toxic chemical quantities. For example, if a chemical is used in the manufacture of refrigerators, the production index would track the number of refrigerators produced and could be used to help gauge how much of the chemical is being released per unit of production.
- Any newly implemented source reduction activities, reported using "W-codes" (e.g., "W41: Increased purity of raw materials")